microSTRUCT varioTM


Especially the field of micromachining is characterized by a trend of miniaturization and highest demands in view of flexibility of the used materials. At this trend, conventional methods of machining like chemical etching or eroding procedures are reaching their limits. Particularly the cutting of microstructures shows the advantages of the non contact machining like the absence of wear, excellent focusability and low heat-affected zones. Similar to other laser machining technologies, laser cutting guarantees nearly unlimited varieties of shapes and materials, very clean cut edges and machining in the range of microns. 

For this reason, 3D-Micromac has developed the laser micromachining-system microCUTTM, which allows to process most different materials, from plastics or ceramics to steel and stainless steel, just in seconds. Superfine cutting applications can be realized by high laser power, burrless and without any further processing. As with all systems of 3D-Micromac, the reliability and unique quality as well as speed and high performance are in the foreground.
 

Choice of laser source for cutting and processing (example)

  • Type: picosecond laser

  • Wave length: 1064 nm

  • Power: up to 50W @ IR

  • Pulse duration: < 15 ps

System description (sample configuration)

  • Max. travel:
    • X-axis: 510 mm
    • Y-axis: 350 mm
    • Z-axis: 50 mm
  • Positioning accuracy: 
    • X-,Y-axis: ±1 μm
  • Repeatability: 
    • X-,Y-axis: ±0,5 μm
    • Z-axis: ±2 μm
  • Max. Load:
    • X-axis: 135 kg
    • Y-axis: 70 kg
  • Automatic substrate alignment system
  • Automatic z-measurement
  • Image recognition system for detection of the location of workpiece 
    • 2- or 4-point detection 
    • Component specific detection
    • Fully automatic adjustment of the workpiece
    • Implementation of messurement tasks
  • Barcode Reader
  • Control software microMMITM
  • Power measurement and -regulation in beampath and at the workpiece level possible

Options (exctract)

  • Cooling system

  • Active exhaust system

  • 2nd laser source and scanner

  • Automatic mask changer


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